総説

スパッタリング反応中に見られる
含遷移金属多重項活性種のマイクロ波分光

Microwave Spectroscopy on the Multiplet Transient Species
Bearing Transition Metals Observed in the Sputtering Reactions

岡林　利明
Toshiaki OKABAYASHI

含遷移金属多重項活性種は気相中への生成が困難であり，またエネルギー構造が複雑なため，これまでは低分解能電子スペクトルによる観測が主であったが，最近のマイクロ波分光法による研究で詳しい物理化学的性質が明らかになってきた．本稿では，著者たちのスパッタリング法を用いた研究を中心に，これらの活性種のマイクロ波分光法による研究成果について簡単に紹介する．

This article reviews the recent development of the observation method of multiplet transient species bearing transition metals using microwave spectroscopy, which is one of the highest-resolution spectroscopic methods. Since it is difficult to efficiently produce such species in the gas phase and to analyze their complicated spectra with a high resolution spectroscopic method, they have been mainly studied through the observation of the electronic spectra with high sensitivity and low resolution. This new method with sputtering reaction enables to reveal the detailed physico-chemical character of such multiplet species.

Keywords ：Microwave Spectroscopy, Transition Metal, Transient Species, Sputtering