講座

X線分光の現在
I.　X線発光分光

Modern X-Ray Spectroscopy
I. X-ray Emission Spectrometry

辻　幸一
Kouichi TSUJI

X線と物質との相互作用，蛍光X線の発生の仕組みなどを説明した後，X線分光実験に必要となるX線源，X線光学素子，X線検出器などのX線要素技術について解説した．さらに，X線発光分光法として蛍光X線分析法，電子プローブX線マイクロアナリシス，荷電粒子X線発光法の３つについて取り上げ，原理と装置構成などを解説した．蛍光X線微量分析と蛍光X線微小部分析，および，3次元蛍光X線分析法について最近の研究動向と研究成果を紹介した．

X-ray fluorescence spectrometry enables non-destructive elemental analysis at ambient air pressure. In this article, after interaction between x-rays and solid matter, mechanism of emission of x-ray fluorescence are explained, recent developments of x-ray source, x-ray optics, especially x-ray polycapillary focusing optics and x-ray detector are introduced. Total reflection x-ray fluorescence and micro x-ray fluorescence, including three dimensional x-ray fluorescence analysis, have been important methods for trace and micro analysis. The principle and applications of these two techniques will be described.

Keywords: x-ray fluorescence, total reflection XRF, 3D-XRF, micro-XRF, EPMA