講座

プラズマと分光分析
VI．分光分析用の新しいプラズマ源

Plasma and Spectroscopic Analysis
VI. New Plasma Sources for Spectroscopic Analysis

宮原　秀一，沖野　晃俊
Hidekazu MIYAHARA and Akitoshi OKINO

Inductively coupled plasma mass spectrometry (ICP-MS) and ICP atomic emission spectrometry (ICP-AES) using argon ICP as an ionization or an excitation source have been widely utilized for trace elemental analysis. To overcome some limitations of conventional argon ICP source is not perfect so some new plasma sources have been investigated. In order to utilize other gas plasma for spectroscopic analysis, multi-gas ICP source was developed. And to reduce consumption of the sample solutions, droplet direct injection nebulizer (D-DIN) and microplasma source was designed and tested. In this article, recent works of these inventions are described.

Keywords: Inductively coupled plasma, Multi gas plasma, Droplet direct injection nebulizer, Atomic emission spectrometry, Mass spectrometry, Microplasma